Airgard

http://airgard.net

Sobre Airgard

Airgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automated gas inlet plunger and custom scrubber inlets are

Palavras Relacionadas

epi - Gás - Silicon Tetrachloride